Examinando por Materia "Magnetron sputtering"
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Ítem Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering(ELSEVIER SCIENCE SA, 2004-07-01) Libardi, J.; Grigorov, K.; Massi, M.; Otani, C.; Ravagnani, S.P.; Maciel, H.S.; Guerino, M.; Ocampo, J.M.J.; Libardi, J.; Grigorov, K.; Massi, M.; Otani, C.; Ravagnani, S.P.; Maciel, H.S.; Guerino, M.; Ocampo, J.M.J.; Universidad EAFIT. Departamento de Ciencias; Electromagnetismo Aplicado (Gema)Mixtures of acetylene/argon and methane/argon with different volume percents of hydrocarbon were used as the precursor gas to grow DLC films, keeping constant the other process parameters. The substrates used were p-type (100) silicon wafers. The films were characterized by Raman spectroscopy, nanoindentation, atomic force microscopy (AFM) and by a profilometer. In order to grow DLC films with special properties that could make this material an alternative candidate for applications in micro-electromechanical systems (MEMS) production, a comparative analysis focused on the influence of the hydrocarbon precursor gas mixture on the mechanical and chemical properties of the DLC films is reported. © 2004 Elsevier B.V. All rights reserved.Ítem Deposition and characterization of duplex treated coating system applied on hot work steel AISI H13(Universidad Simon Bolivar, 2012-01-01) Gaitan, G.B.; Botero, M.G.; Franco, M.A.; Universidad EAFIT. Departamento de Ciencias Básicas; Electromagnetismo Aplicado (Gema)AISI H13 steel is widely used for extrusion moulds and other hot work tools fabrication, due to its high toughness, strength and hardness around 56 HRC (Rockwell C). However, this steel possesses a relatively low wear resistance, which reduces its life time under high loading conditions. The aim of this work was to enhance the wear resistance of the steel H13 using the following surface treatments: austenitizing + quenching + tempering (further called "tempering"), tempering and bath nitriding, tempering and coated with chromium nitride (CrN), tempering + bath nitriding + coated with CrN (further called "Duplex coating"). The properties of the treated samples were compared with each other in dependence of the made surface treatment. The coatings were deposited using the r.f. balanced magnetron sputtering deposition technique. The total thickness of the coatings was maintained at 5 µm, while the thickness of the nitrided zone was approximately 140 µm. The microstructure and the crystalline phase composition were investigated by Scanning Electron Microscopy (SEM) and X-ray diffraction (XRD) technique, respectively. The hardness and the adhesion of the coatings were determined by micro indentation measurements and the Rockwell indentation test, respectively. The wear resistance of the coatings was evaluated using ball on disc tests. The duplex treated samples presented a hardness three order of magnitude higher and showed a wear rate six times smaller than those samples only tempered. © 2012 Universidad Simón Bolívar.Ítem Producción de recubrimientos de nitruro de renio (ReNx) depositados mediante la técnica de magnetrón sputtering reactivo(Universidad EAFIT, 2020) Hernández Higuita, Javier Ignacio; Arroyave Franco, Mauricio; Palacio Espinosa, Claudia ConstanzaÍtem Synthesis of Alumina Thin Films Using Reactive Magnetron Sputtering Method(IOP PUBLISHING LTD, 2017-06-13) Angarita G.; Palacio C.; Trujillo M.; Arroyave M.; Angarita G.; Palacio C.; Trujillo M.; Arroyave M.; Universidad EAFIT. Departamento de Ciencias; Electromagnetismo Aplicado (Gema)Alumina (Al2O3) thin films were deposited on Si (100) by Magnetron Sputtering in reactive conditions between an aluminium target and oxygen 99.99% pure. The plasma was formed employing Argon with an R.F power of 100 W, the dwelling time was 3 hours. 4 samples were produced with temperatures between 350 and 400 °C in the substrate by using an oxygen flow of 2 and 8 sccm, the remaining parameters of the process were fixed. The coatings and substrates were characterized using Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Energy Dispersive Spectroscopy (EDS) in order to compare their properties before and after deposition. The films thicknesses were between 47 and 70 nm. The results show that at high oxygen flow the alumina structure prevails in the coatings while at lower oxygen flow only aluminum is deposited in the coatings. It was shown that the temperature increases grain size and roughness while decreasing the thicknesses of the coatings. © Published under licence by IOP Publishing Ltd.