Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

Libardi, J.; Grigorov, K.; Massi, M.; Otani, C.; Ravagnani, S.P.; Maciel, H.S.; Guerino, M.; Ocampo, J.M.J.

Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

Fecha

2004-07-01

Autores

Libardi, J.

Grigorov, K.

Massi, M.

Otani, C.

Ravagnani, S.P.

ISSN de la revista

406090

Editor

ELSEVIER SCIENCE SA

Resumen

Mixtures of acetylene/argon and methane/argon with different volume percents of hydrocarbon were used as the precursor gas to grow DLC films, keeping constant the other process parameters. The substrates used were p-type (100) silicon wafers. The films were characterized by Raman spectroscopy, nanoindentation, atomic force microscopy (AFM) and by a profilometer. In order to grow DLC films with special properties that could make this material an alternative candidate for applications in micro-electromechanical systems (MEMS) production, a comparative analysis focused on the influence of the hydrocarbon precursor gas mixture on the mechanical and chemical properties of the DLC films is reported. © 2004 Elsevier B.V. All rights reserved.