Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

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dc.contributor.authorLibardi, J.
dc.contributor.authorGrigorov, K.
dc.contributor.authorMassi, M.
dc.contributor.authorOtani, C.
dc.contributor.authorRavagnani, S.P.
dc.contributor.authorMaciel, H.S.
dc.contributor.authorGuerino, M.
dc.contributor.authorOcampo, J.M.J.
dc.contributor.departmentUniversidad EAFIT. Departamento de Cienciasspa
dc.contributor.researchgroupElectromagnetismo Aplicado (Gema)spa
dc.creatorLibardi, J.
dc.creatorGrigorov, K.
dc.creatorMassi, M.
dc.creatorOtani, C.
dc.creatorRavagnani, S.P.
dc.creatorMaciel, H.S.
dc.creatorGuerino, M.
dc.creatorOcampo, J.M.J.
dc.date.accessioned2021-03-23T21:39:08Z
dc.date.available2021-03-23T21:39:08Z
dc.date.issued2004-07-01
dc.description.abstractMixtures of acetylene/argon and methane/argon with different volume percents of hydrocarbon were used as the precursor gas to grow DLC films, keeping constant the other process parameters. The substrates used were p-type (100) silicon wafers. The films were characterized by Raman spectroscopy, nanoindentation, atomic force microscopy (AFM) and by a profilometer. In order to grow DLC films with special properties that could make this material an alternative candidate for applications in micro-electromechanical systems (MEMS) production, a comparative analysis focused on the influence of the hydrocarbon precursor gas mixture on the mechanical and chemical properties of the DLC films is reported. © 2004 Elsevier B.V. All rights reserved.eng
dc.identifierhttps://eafit.fundanetsuite.com/Publicaciones/ProdCientif/PublicacionFrw.aspx?id=1846
dc.identifier.doi10.1016/j.tsf.2003.12.131
dc.identifier.issn406090
dc.identifier.otherWOS;000222217100064
dc.identifier.otherSCOPUS;2-s2.0-2942534389
dc.identifier.urihttp://hdl.handle.net/10784/27135
dc.language.isoengeng
dc.publisherELSEVIER SCIENCE SA
dc.relation.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-2942534389&doi=10.1016%2fj.tsf.2003.12.131&partnerID=40&md5=93874afb2c52de4564823d873b4d796d
dc.rightshttps://v2.sherpa.ac.uk/id/publication/issn/0040-6090
dc.sourceThin Solid Films
dc.subject.keywordAcetyleneeng
dc.subject.keywordArgoneng
dc.subject.keywordAtomic force microscopyeng
dc.subject.keywordComposition effectseng
dc.subject.keywordIndentationeng
dc.subject.keywordMagnetron sputteringeng
dc.subject.keywordMethaneeng
dc.subject.keywordMicroelectromechanical deviceseng
dc.subject.keywordProfilometryeng
dc.subject.keywordRaman spectroscopyeng
dc.subject.keywordSputter depositioneng
dc.subject.keywordgas dischargeeng
dc.subject.keywordSilicon substrateseng
dc.subject.keywordDiamond like carbon filmseng
dc.titleComparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputteringeng
dc.typeinfo:eu-repo/semantics/conferencePapereng
dc.typeconferencePapereng
dc.typeinfo:eu-repo/semantics/publishedVersioneng
dc.typepublishedVersioneng
dc.type.localDocumento de conferenciaspa

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