Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
| dc.citation.epage | 64 | |
| dc.citation.issue | 20 | |
| dc.citation.journalAbbreviatedTitle | ing.cienc. | eng |
| dc.citation.journalTitle | Ingeniería y Ciencia | eng |
| dc.citation.spage | 51 | |
| dc.citation.volume | 10 | |
| dc.contributor.affiliation | Universidad Tecnológica de Pereira | spa |
| dc.contributor.affiliation | Universidad Nacional de Colombia | spa |
| dc.contributor.author | Devia, D M | spa |
| dc.contributor.author | Rodriguez-Restrepo, L. V | spa |
| dc.contributor.author | Restrepo-Parra, E | spa |
| dc.coverage.spatial | Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees | eng |
| dc.date | 2014-06-24 | |
| dc.date.accessioned | 2019-11-22T16:48:49Z | |
| dc.date.available | 2019-11-22T16:48:49Z | |
| dc.date.issued | 2014-06-24 | |
| dc.description | TixAl1-xN coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscop | eng |
| dc.description | Los recubrimientos TixAl1-xN se cultivaron usando la técnica de pulverización catódica con magnetrón triodo, variando el voltaje de polarización entre -40 V y -150V. La influencia del voltaje de polarización en las propiedades estructurales y morfológicas | spa |
| dc.format | application/pdf | |
| dc.identifier.doi | 10.17230/ingciencia.10.20.4 | |
| dc.identifier.issn | 2256-4314 | |
| dc.identifier.issn | 1794-9165 | |
| dc.identifier.uri | http://hdl.handle.net/10784/14397 | |
| dc.language.iso | eng | eng |
| dc.publisher | Universidad EAFIT | spa |
| dc.relation.isversionof | http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038 | |
| dc.relation.uri | http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038 | |
| dc.rights | Copyright (c) 2014 D M Devia, E Restrepo-Parra, J M Vélez-Restrepo | eng |
| dc.rights.accessrights | info:eu-repo/semantics/openAccess | eng |
| dc.rights.local | Acceso abierto | spa |
| dc.source | instname:Universidad EAFIT | |
| dc.source | reponame:Repositorio Institucional Universidad EAFIT | |
| dc.source | Ingeniería y Ciencia; Vol 10, No 20 (2014) | spa |
| dc.subject.keyword | Tialn | eng |
| dc.subject.keyword | Bias Voltage | eng |
| dc.subject.keyword | Sputtering | eng |
| dc.subject.keyword | Atomic Percentage | eng |
| dc.subject.keyword | Xrd | eng |
| dc.subject.keyword | Tialn | spa |
| dc.subject.keyword | Voltaje De Polarización | spa |
| dc.subject.keyword | Pulverización Catódica | spa |
| dc.subject.keyword | Porcentaje Atómico | spa |
| dc.subject.keyword | Drx | spa |
| dc.title | Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering | eng |
| dc.title | Propiedades morfológicas y estructurales de recubrimientos nitruro de titanio aluminio producidos por magnetron sputtering tríodo | spa |
| dc.type | article | eng |
| dc.type | info:eu-repo/semantics/article | eng |
| dc.type | publishedVersion | eng |
| dc.type | info:eu-repo/semantics/publishedVersion | eng |
| dc.type.local | Artículo | spa |