Browsing by Author "Ocampo, J.M.J."
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Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering
Libardi, J.; Grigorov, K.; Massi, M.; Otani, C.; Ravagnani, S.P.; Maciel, H.S.; Guerino, M.; Ocampo, J.M.J. (ELSEVIER SCIENCE SA, 2004-07-01)Mixtures of acetylene/argon and methane/argon with different volume percents of hydrocarbon were used as the precursor gas to grow DLC films, keeping constant the other process parameters. The substrates used were p-type ...
